Diamond-turning-assisted fabrication of a high-numerical-aperture lens assembly for 157-nm microlithography-Reference-Cited by-同舟云学术

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Diamond-turning-assisted fabrication of a high-numerical-aperture lens assembly for 157-nm microlithography

Published:2003-10-20 Issue: Volume: Page:
ISSN:0277-786X
Container-title:SPIE Proceedings
language:
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Author:

Arriola Edmund W.

Publisher

SPIE

Cited by 5 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

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4. Mounting Individual Lenses;Optical Science and Engineering;2005-12-09

5. Design and Mounting of Metallic Mirrors;Optical Science and Engineering;2005-12-09

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