Author:
Choi Hyungseok,Ahn Yohan,Ryu Jua,Lee Yangkoo,An Bumhyun,Lee Seokryeol
Cited by
3 articles.
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1. Optical Investigation of Deep Ultraviolet Degradation of Pellicles;Japanese Journal of Applied Physics;2010-05-20
2. Haze Defects due to Pellicle Adhesive;Japanese Journal of Applied Physics;2008-11-14
3. Ellipsometry for Pellicle-Covered Surface;Japanese Journal of Applied Physics;2008-08-08