1. 3D physical modeling for patterning process development;Sarma,2010
2. Three-dimensional physical photoresist model calibration and profile-based pattern verification;Talbi,2010
3. Evaluating the Accuracy of a calibrated Rigorous Physical Resist Model Under Various Process and Illumination Conditions;Robertson,2008
4. 3D Lumped Parameter Model for Lithographic Simulations;Byers,2002
5. The Development of a Fast Physical Photoresisit Model for OPE and SMO Applications from an Optical Engineering Perspective;Flagello,2012