Ultra-compact MEMS FTIR spectrometer
Author:
Affiliation:
1. Si-Ware Systems (Egypt)
2. Ain-Shams Univ. (Egypt)
Publisher
SPIE
Reference14 articles.
1. Fourier Transform Infrared Spectrometry
2. Monolithic silicon-micromachined free-space optical interferometers onchip
3. Curved Silicon Micromirror for Linear Displacement-to-Angle Conversion With Uniform Spot Size
4. Characterization of MEMS FTIR spectrometer
5. MEMS tunable Michelson interferometer with robust beam splitting architecture
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