Analysis of the influence of technological parameters on electrophysical and frequency characteristics of RF MEMS-Reference-Cited by-同舟云学术

Analysis of the influence of technological parameters on electrophysical and frequency characteristics of RF MEMS

Published:2019-10-16 Issue: Volume: Page:
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Container-title:Emerging Imaging and Sensing Technologies for Security and Defence IV
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Author:

Belevtsev Andrei M.,Epaneshnikova Irina K.,Kruchkov Vasiliy L.,Dryagin Ivan O.,Lukichev Vladimir F.,Boldyreff Anton S.

Publisher

SPIE

Reference10 articles.

1. The Method for Designing the Topology of the RF MEMS Switch About

2. Maltsev P. P., Pavlov. A. Yu., Sevruk B. V. / Design and fabrication of narrow-band microwave microelectromechanical switch for frequency 10-12 GHz on gallium arsenide substrates. // Nano-and Microsystem technology-2014. - No. 6

3. Reduced height RF MEMS for low GHz frequencies;Bandana,2011

4. Belevtsev A. M., Dryagin I. O., Alferova M. S., Razbash R. V./ The advantages of RF MEMS switches over a modern solid-state switches //Gagarin readings – 2018: youth XLIV international scientific conference: book of abstracts: M.; Moscow Aviation Institute (National Research University), 2018. - 417c.

5. Epaneshnikova I. K., Dryagin I. O./ Feature selection for the development of a switch based on MEMS technologies // Gagarin readings – 2017: XLIII International scientific conference: book of abstracts: M.; Moscow Aviation Institute (National Research University), 2017. S. 616–619

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