Precise wide-range three-dimensional shape measurement method to measure superfine structures based on speckle interferometry
Author:
Affiliation:
1. Kansai University, Faculty of Engineering Science, Department of Mechanical Engineering, Suita
Publisher
SPIE-Intl Soc Optical Eng
Subject
General Engineering,Atomic and Molecular Physics, and Optics
Reference41 articles.
1. Interferometric displacement measurement on scattering surfaces utilizing speckle effect
2. Speckle pattern and holographic techniques in engineering metrology
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1. Simulation-Based Considerations on the Rayleigh Criterion in Super-Resolution Techniques Based on Speckle Interferometry;Photonics;2023-03-28
2. Factors affecting the measurement resolution of super-resolution techniques based on speckle interferometry;Journal of Modern Optics;2022-06-30
3. Algorithm of CAD Surface Generation for Complex Pipe Model in Industry 4.0 Background;Computational Intelligence and Neuroscience;2022-04-12
4. Shape Measurement Method of Two-Dimensional Micro-Structures beyond the Diffraction Limit Based on Speckle Interferometry;Photonics;2021-09-30
5. Observation of micro-characters using three-dimensional shape measurement method based on speckle interferometry;Journal of Modern Optics;2020-10-23
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