1. Fraunhofer Institute for Applied Optics and Precision Engineering IOF, Precision Engineering Department, Albert-Einstein-Straße 7, Jena 07745, GermanybFriedrich-Schiller-University Jena, Institute for Applied Physics, Abbe Center of Photonics, Max-Wien-Pl
2. Sodern, Engineering Department, 67 Avenue de Valenton B.P. 23, 94451 Limeil-Brévannes, France
3. Fraunhofer Institute for Applied Optics and Precision Engineering IOF, Precision Engineering Department, Albert-Einstein-Straße 7, Jena 07745, Germany