Uncooled silicon germanium oxide (Si<sub>x</sub>Ge<sub>y</sub>O<sub>1-x-y</sub>) thin films for infrared detection

Author:

Hai M. L.,Hesan M.,Lin J.,Cheng Q.,Jalal M.,Syllaios A. J.,Ajmera S.,Almasri M.

Publisher

SPIE

Cited by 6 articles. 订阅此论文施引文献 订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献

1. Noise behavior of tungsten oxide doped amorphous vanadium oxide thin films;Sensors and Actuators A: Physical;2022-08

2. Material response of metasurface integrated uncooled silicon germanium oxide SixGeyO1-x-y infrared microbolometers;Infrared Technology and Applications XLV;2019-06-04

3. Metasurface Based Uncooled Microbolometer with High Fill Factor;2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII (TRANSDUCERS & EUROSENSORS XXXIII);2019-06

4. Amorphous SixGeyO1−x−y thin films for uncooled infrared microbolometers;Infrared Physics & Technology;2018-12

5. Noise Reduction of Amorphous SixGeyO1–x–yThin Films for Uncooled Microbolometers by Si3N4Passivation and Annealing in Vacuum;IEEE Sensors Journal;2016-03

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