1. www.awscales.com/support/terminology
2. MEMS Sensors for mm-Range Displacement Measurements with Sub-nm-Resolution;Stavrov,2013
3. Contact Mode MEMS Position Sensors with Piezoresistive Detection;Todorov,2014
4. Accuracy Improvement for Stiffness Modelling of Parallel Manipulators;Pashkevich,2009
5. Stiffness modeling of flexure parallel mechanism