1. Ultra-precision surface finishing by ion beam and plasma jet techniques—status and outlook
2. Super-smooth Surface Defects Measurement and Evaluation System;Gao;International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment,2010
3. Optics and Precision Engineering
4. Characterization of surface defects of silicon substrates by the total scattering and absorption;Zhang,2017
5. Deep Level Energy Analysis of Surface and Bulk Defects Using a Noncontact Laser/Microwave Photoconductance Technique;Buczkowski;Mrs Proceedings,1992