1. Optical methods for micromachine monitoring and feedback
2. J. Chen, P. Famouri, and L. Hornak, “Nonlinear control of MEMS: microengine sliding control simulation,” inProc. Int. Conf. on Intelligent Systems and Control, pp. 96–101, Santa Barbara, CA, October 28–30 (1999).
3. See e.g., NIST Workshop, “Metrology issues in micromachining and micromanufacturing III: government programs in MEMS metrology,”Proc. SPIE3223, Austin, Texas, Sept. 28–Oct. 2 (1997).
4. Optical measurement of LIGA milliengine performance
5. Optical probe for micromachine performance analysis