EUV patterned templates with grapho-epitaxy DSA at the N5/N7 logic nodes
Author:
Gronheid Roel1, Boeckx Carolien1, Doise Jan1, Bekaert Joost1, Karageorgos Ioannis1, Ruckaert Julien1, Chan Boon Teik1, Lin Chenxi2, Zou Yi2
Affiliation:
1. IMEC (Belgium) 2. ASML Brion (United States)
Reference12 articles.
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