Displacement measurement with nanoscale resolution using a coded micro-mark and digital image correlation
Author:
Publisher
SPIE-Intl Soc Optical Eng
Subject
General Engineering,Atomic and Molecular Physics, and Optics
Reference28 articles.
1. Non-incremental interferometric displacement measurement using a laser Doppler sensor with phase coding
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4. Power-Efficient High-Speed and High-Resolution Capacitive-Sensor Interface for Subnanometer Displacement Measurements
5. Design of a Linear Variable Differential Transformer With High Rejection to External Interfering Magnetic Field
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2. A Review of Computer Microvision-Based Precision Motion Measurement: Principles, Characteristics, and Applications;IEEE Transactions on Instrumentation and Measurement;2021
3. Sensing One Nanometer Over Ten Centimeters: A Microencoded Target for Visual In-Plane Position Measurement;IEEE/ASME Transactions on Mechatronics;2020-06
4. Realtime in-plane displacements tracking of the precision positioning stage based on computer micro-vision;Mechanical Systems and Signal Processing;2019-06
5. Displacement Analysis of Solar Magnetic Field Images in EUV Wavelengths of Space Solar Telescope;International Journal of Pattern Recognition and Artificial Intelligence;2019-02-19
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