In situandex situcharacterization of optical surfaces by light scattering techniques-Reference-Cited by-同舟云学术

In situandex situcharacterization of optical surfaces by light scattering techniques

Published:2014-08-11 Issue:9 Volume:53 Page:092013
ISSN:0091-3286
Container-title:Optical Engineering
language:en
Short-container-title:Opt. Eng

Author:

Trost Marcus¹,Herffurth Tobias¹,Schröder Sven²,Duparré Angela²,Beier Matthias¹,Risse Stefan²,Tünnermann Andreas¹,Böwering Norbert³

Affiliation:

1. Fraunhofer Institute for Applied Optics and Precision Engineering, Albert-Einstein-Straße 7, 07745 Jena, GermanybFriedrich-Schiller-Universität Jena, Institute of Applied Physics, Abbe Center of Photonics, Max Wien Platz 1, 07743 Jena, Germany

2. Fraunhofer Institute for Applied Optics and Precision Engineering, Albert-Einstein-Straße 7, 07745 Jena, Germany

3. Cymer BV, De Run 4312B, 5503 LN Veldhoven, The Netherlands

Publisher

SPIE-Intl Soc Optical Eng

Subject

General Engineering,Atomic and Molecular Physics, and Optics

Cited by 12 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. The art of characterizing light scattering from optical components and systems;International Conference on Space Optics — ICSO 2022;2023-07-12

2. Roughness, particle, and defect analysis of freeform surfaces;Optical Interference Coatings Conference (OIC) 2022;2022

3. Coatings with barrier layers for extreme‐short wavelengths;Vakuum in Forschung und Praxis;2021-10

4. Reducing light scattering of single-layer TiO2 and single-layer SiO2 optical thin films;Optik;2021-04

5. Analysis of mid-spatial frequency errors in two dimensions at metal mirror fabrication;Optifab 2019;2019-11-15