Application of the time-invariant linear filter approximation to parametrization of surface metrology with high-quality x-ray optics-Reference-Cited by-同舟云学术

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Application of the time-invariant linear filter approximation to parametrization of surface metrology with high-quality x-ray optics

Published:2014-08-06 Issue:8 Volume:53 Page:084102
ISSN:0091-3286
Container-title:Optical Engineering
language:en
Short-container-title:Opt. Eng

Author:

Yashchuk Valeriy V.¹,Tyurin Yury N.²,Tyurina Anastasia Y.³

Affiliation:

1. Lawrence Berkeley National Laboratory, Berkeley, California 94720, United States

2. Moscow State University, Moscow 119991, RussiacSecond Star Algonumerics, Needham, Massachusetts 02494, United States

3. Scientific Systems, Woburn, Massachusetts 01801, United States

Publisher

SPIE-Intl Soc Optical Eng

Subject

General Engineering,Atomic and Molecular Physics, and Optics

Cited by 12 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Super-resolution surface slope metrology of x-ray mirrors;Review of Scientific Instruments;2020-07-01

2. Stochastic analysis of surface metrology;Optical Engineering;2019-08-09

3. High-efficiency X-ray multilayer-coated blazed gratings with shifted boundaries;Journal of Synchrotron Radiation;2019-07-19

4. Stochastic analysis of 1D and 2D surface topography of x-ray mirrors;Advances in Computational Methods for X-Ray Optics IV;2017-08-23

5. Modeling surface topography of state-of-the-art x-ray mirrors as a result of stochastic polishing process: recent developments;SPIE Proceedings;2016-09-08

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