1. Level crossing methodology applied to line-edge roughness characterization;Mack,2017
2. Global minimization line-edge roughness analysis of top down SEM Images;Lane,2017
3. Robust 2D patterns process variability assessment using CD-SEM contour extraction offline metrology;Lakcher,2017
4. Application of SEM-Based Contours for OPC Model Weighting and Sample Plan Reduction;Miller,2015
5. Experiments using Automated Sample Plan Selection for OPC modeling;Viswanathan,2015