1. EUV Pellicle Development for Mask Defect Control;Shroff,2006
2. Investigation of EUV pellicle feasibility;Scaccabarozi,2013
3. CLOSING ADDRESS;Ronse,2016
4. 16 hp EUV reticle inspection with a 193 nm inspection system;Broadbent,2017
5. Realization of EUV Pellicle with Single Crystal Silicon Membrane;Akiyama,2009