Author:
Xu Xiangdong,Hong Yilin,Fu Shaojun
Cited by
10 articles.
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2. A Review on Fabrication of Blazed Gratings;Journal of Physics D: Applied Physics;2021-04-30
3. Fabrication of the nanoimprint mold with deep-subwavelength structures;SPIE Proceedings;2016-10-25
4. Fine-tuning the etch depth profile via dynamic shielding of ion beam;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;2016-08
5. Fabrication of the nanoimprint template with periodic structures;Advanced Fabrication Technologies for Micro/Nano Optics and Photonics VII;2014-03-07