Fabrication of high-aspect ratio silicon nanopillars for tribological experiments-Reference-Cited by-同舟云学术

Fabrication of high-aspect ratio silicon nanopillars for tribological experiments

Published:2015-12-10 Issue:4 Volume:14 Page:044506
ISSN:1932-5150
Container-title:Journal of Micro/Nanolithography, MEMS, and MOEMS
language:en
Short-container-title:J. Micro/Nanolith. MEMS MOEMS

Author:

Antonov Pavlo V.¹,Zuiddam Marc R.²,Frenken Joost W.M.¹

Affiliation:

1. Leiden University, Huygens-Kamerlingh Onnes Laboratory, Niels Bohrweg 2, Leiden, 2233 CA, The NetherlandsbAdvanced Research Center for Nanolithography, Science Park 110, Amsterdam, 1098 XG, The Netherlands

2. Delft University of Technology, Kavli NanoLab, Lorentzweg 1, Delft, 2628 CJ, The Netherlands

Publisher

SPIE-Intl Soc Optical Eng

Subject

Electrical and Electronic Engineering,Mechanical Engineering,Condensed Matter Physics,Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials

Reference21 articles.

1. Multifunctional, flexible electronic systems based on engineered nanostructured materials

2. Trends in Nanotechnology Patents Applied to the Health Sector

3. Multifunctional porous silicon nanopillar arrays: antireflection, superhydrophobicity, photoluminescence, and surface-enhanced Raman scattering

4. High-performance lithium battery anodes using silicon nanowires

5. High-Efficiency Nanostructured Window GaAs Solar Cells

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