HfO2/SiO2multilayer based reflective and transmissive optics from the IR to the UV

Author:

Wang Jue,Hart Gary A.,Oudard Jean Francois,Wamboldt Leonard,Roy Brian P.

Publisher

SPIE

Reference16 articles.

1. HfO2/SiO2 multilayer enhanced aluminum alloy-based dual-wavelength high reflective optics;Angela,2015

2. Effects of thermal treatment on infrared optical properties of SiO2 films on Si substrates;Ji,2013

3. Effect of Advanced Plasma Source bias voltage on properties of HfO2 films prepared by plasma ion assisted electron evaporation from metal hafnium;Meiping,2013

4. BDS thin film damage competition;Stolz,2008

5. Optical properties of HfO2 thin films deposited by magnetron sputtering: from the visible to the far infrared;Bright,2012

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