Reactive multitarget magnetron sputtering of Sr2FeMoO6 films

Author:

Bitinaitis Ignas,Belosludtsev Alexandr,Suchaneck Gunnar,Wang Sitao,Gerlach Gerald,Sobolev Nikolai A.

Publisher

SPIE

Reference20 articles.

1. Sputtering techniques for epitaxial growth of complex oxides

2. A critical review of physical vapor deposition techniques for the synthesis of ferroelectric thin films;Auciello,1992

3. Characterization of Pb(Zr,Ti)O3 thin films deposited from multi-element metal targets;Sreenivas;J. Appl. Phys.,1988

4. Study of the sputtering of one-, two- and three-component targets for the preparation of Yba2Cu3O7 superconducting films. Thin Solid Films;Hirata,1991

5. characterization of Pb(Zr,Ti)O3 films deposited by reactive sputtering of metallic targets;Croteau,1986

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