Fabrication of optical ridge waveguide in lithium niobate by argon sputtering and titanium self-alignment in-diffusion
Author:
Affiliation:
1. Malek Ashtar University, Department of Electronics, Shabanloo Street, Lavizan, Tehran, Tehran Province, Iran
2. University of Isfahan, Department of Physics, Faculty of Science, Hezar Jerib Street, Isfahan 81764-73441, Iran
Publisher
SPIE-Intl Soc Optical Eng
Subject
Condensed Matter Physics,Electronic, Optical and Magnetic Materials
Reference13 articles.
1. 75 GHz broadband Ti:LiNbO3 optical modulator with ridge structure
2. Comparison of guided‐wave interferometric modulators fabricated on LiNbO3via Ti indiffusion and proton exchange
3. Deep anisotropic LiNbO3etching with SF6/Ar inductively coupled plasmas
4. Lithium Niobate Ridge Waveguides Fabricated by Wet Etching
5. A novel wet-etching method using joint proton source in LiNbO/sub 3/
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