Study of device mass production capability of the character projection based electron beam direct writing process technology toward 14 nm node and beyond-Reference-Cited by-同舟云学术

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Study of device mass production capability of the character projection based electron beam direct writing process technology toward 14 nm node and beyond

Published:2012-03-01 Issue: Volume: Page:
ISSN:0277-786X
Container-title:Alternative Lithographic Technologies IV
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Author:

Kojima Yoshinori,Takahashi Yasushi,Takakuwa Masaki,Ohshio Shuzo,Sugatani Shinji,Tujimura Ryo,Takita Hiroshi,Ogino Kozo,Hoshino Hiromi,Ito Yoshio,Miyajima Masaaki,Kon Jun-ichi

Publisher

SPIE

Cited by 4 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Review of Development and Performance Evaluation of Active-matrix Nanocrystalline Si Electron Emitter Array for Massively Parallel Electron Beam Direct-write Lithography;IEEJ Transactions on Sensors and Micromachines;2015

2. Active-matrix nanocrystalline Si electron emitter array with a function of electronic aberration correction for massively parallel electron beam direct-write lithography: Electron emission and pattern transfer characteristics;Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena;2013-11

3. Practical study on the electron-beam-only alignment strategy for the electron beam direct writing technology;Alternative Lithographic Technologies V;2013-03-26

4. Active-matrix nanocrystalline Si electron emitter array for massively parallel direct-write electron-beam system: first results of the performance evaluation;Journal of Micro/Nanolithography, MEMS, and MOEMS;2012-08-09

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