Improving accuracy of high precision displacement measurement system with optical pickup head by using differential astigmatism focus error detection-Reference-Cited by-同舟云学术

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Improving accuracy of high precision displacement measurement system with optical pickup head by using differential astigmatism focus error detection

Published:2018-11-15 Issue: Volume: Page:
ISSN:
Container-title:Tenth International Conference on Information Optics and Photonics
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Author:

Quang Sang Vo,Fang Fengzhou,Zhu Linlin,Zhang Xiaodong

Publisher

SPIE

Reference7 articles.

1. Nanometer profile measurement of large aspheric optical surface by scanning deflectometry with rotatable devices;Takahashi;Proc. SPIE,2011

2. Non-contact measurement machine for freeform optics;Henselmans;Macromolecules,2009

3. Development of three-dimensional tracking system using astigmatic lens method for microscopes;Kibata,2017

4. Measurement of microthermal deformations in an optical pick-up base using holographic interferometry

5. Micro-device characterization platform using HD-DVD optical pickup;Miyashita,2017

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