New materials and processes for directed self-assembly-Reference-Cited by-同舟云学术

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New materials and processes for directed self-assembly

Published:2013-03-26 Issue: Volume: Page:
ISSN:0277-786X
Container-title:Alternative Lithographic Technologies V
language:
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Author:

Chang Shih-wei,Evans Jessica P.,Ge Shouren,Ginzburg Valeriy V.,Kramer John W.,Landes Brian,Lee Christopher,Meyers Greg F.,Murray Daniel J.,Park Jong,Sharma Rahul,Trefonas Peter,Weinhold Jeffrey D.,Zhang Jieqian,Hustad Phillip D.

Publisher

SPIE

Cited by 14 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Straightforward directed self-assembly process flows enabled by advanced materials;Advances in Patterning Materials and Processes XXXV;2018-03-13

2. Highχ block copolymers for directed self-assembly patterning without the need for topcoat or solvent annealing;SPIE Proceedings;2017-03-27

3. Rapid ordering of block copolymer thin films;Journal of Physics: Condensed Matter;2016-08-18

4. Enhanced patterning by tilted ion implantation;SPIE Proceedings;2016-03-22

5. Nanomanufacturing: A Perspective;ACS Nano;2016-02-22

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