Defect source analysis of directed self-assembly process (DSA of DSA)-Reference-Cited by-同舟云学术

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Defect source analysis of directed self-assembly process (DSA of DSA)

Published:2013-03-26 Issue: Volume: Page:
ISSN:0277-786X
Container-title:Alternative Lithographic Technologies V
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Author:

Rincon Delgadillo Paulina,Harukawa Ryota,Suri Mayur,Durant Stephane,Cross Andrew,Nagaswami Venkat R.,Van Den Heuvel Dieter,Gronheid Roel,Nealey Paul

Publisher

SPIE

Cited by 32 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. 导向自组装光刻仿真技术;Chinese Journal of Lasers;2024

2. Sequential Brush Grafting for Chemically and Dimensionally Tolerant Directed Self-Assembly of Block Copolymers;ACS Applied Materials & Interfaces;2022-12-19

3. Directed Self-Assembly of Block Copolymers for the Fabrication of Functional Devices;Polymers;2020-10-21

4. Directed self-assembly of block copolymers for sub-10 nm fabrication;International Journal of Extreme Manufacturing;2020-08-12

5. Research Update: Electron beam-based metrology after CMOS;APL Materials;2018-07

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