Real-time photolithographic technique for fabrication of arbitrarily shaped microstructures
Author:
Publisher
SPIE-Intl Soc Optical Eng
Subject
General Engineering,Atomic and Molecular Physics, and Optics
Reference10 articles.
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1. Liquid metal-based reconfigurable and stretchable photolithography;Journal of Micromechanics and Microengineering;2016-02-24
2. Direct write of optical diffractive elements and planar waveguides with a digital micromirror device based UV photoplotter;Optics Communications;2010-08
3. Lineshape and morphology study of structures formed using a reconfigurable photomasking element;Journal of Micro/Nanolithography, MEMS, and MOEMS;2008-07-01
4. Application of liquid crystal polymer films for photolithographic fabrication of 3D structures;SPIE Proceedings;2008-02-07
5. Reconfigurable lithographic applications using polymer liquid crystal composite films;SPIE Proceedings;2007-10-05
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