Resonant-type MEMS transducers excited by two acoustic emission simulation techniques
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Published:2004-07-29
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ISSN:0277-786X
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Container-title:Smart Structures and Materials 2004: Sensors and Smart Structures Technologies for Civil, Mechanical, and Aerospace Systems
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Author:
Ozevin Didem,Greve David W.,Oppenheim Irving J.,Pessiki Stephen