Design space analysis of novel interconnect constructs for 22nm FDX technology-Reference-Cited by-同舟云学术

Design space analysis of novel interconnect constructs for 22nm FDX technology

Published:2017-03-30 Issue: Volume: Page:
ISSN:0277-786X
Container-title:SPIE Proceedings
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Author:

Guha Neogi Tuhin¹,Jain Navneet¹,Verma Piyush¹,Permana David¹,Lutich Andrey²,Weishbuch Francois²,Wehella-Gamage Deepal¹,Ramadout Benoit Francois Claude³,Vangara Gowtham¹,Kim Juhan¹,Herrmann Thomas³,Sun Kai¹,Babich Katherina¹,Pritchard David⁴,Rashed Mahbub⁴

Affiliation:

1. GLOBALFOUNDRIES Inc. (United States)

2. GLOBALFOUNDRIES Dresden Module Two, GmbH & Co. KG (Germany)

3. GLOBALFOUNDRIES Dresden Module One LLC & Co. KG (Germany)

4. GLOBALFOUNDRIES Inc. (Germany)

Publisher

SPIE

Reference10 articles.

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5. Design-of-experiments based design rule optimization

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