High-accuracy autocollimator calibration by interferometric 2D angle generator-Reference-Cited by-同舟云学术

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High-accuracy autocollimator calibration by interferometric 2D angle generator

Published:2019-09-09 Issue: Volume: Page:
ISSN:
Container-title:Advances in Metrology for X-Ray and EUV Optics VIII
language:
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Author:

Heikkinen Ville,Byman Ville,Shpak M.,Geckeler Ralf D.,Just Andreas,Krause Michael,Schumann Matthias,Lassila Antti

Publisher

SPIE

Reference27 articles.

1. Autocollimators for deflectometry: Current status and future progress

2. Modern Developments in X-Ray and Neutron Optics

3. “The International System of Units (SI),” 9th edition, BIPM, Sèvres France, https://www.bipm.org/en/publications/si-brochure/, ISBN 978-92-822-2272-0 (2019).

4. Calibration of high-resolution electronic autocollimators against an angle comparator

5. The NRC autocollimator calibration facility

Cited by 3 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. A Review: High-Precision Angle Measurement Technologies;Sensors;2024-03-08

2. Compact instantaneous phase-shifting Sagnac interferometer for nanoscale tilt measurement;Optics & Laser Technology;2022-09

3. A comparison of traceable spatial angle autocollimator calibrations performed by PTB and VTT MIKES;Metrologia;2021-12-13

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