Fabrication of nanostructures on silicon carbide surface and microgroove sidewall using 800-nm femtosecond laser-Reference-Cited by-同舟云学术

Fabrication of nanostructures on silicon carbide surface and microgroove sidewall using 800-nm femtosecond laser

Published:2015-07-23 Issue:7 Volume:54 Page:077102
ISSN:0091-3286
Container-title:Optical Engineering
language:en
Short-container-title:Opt. Eng

Author:

Khuat Vanthanh¹,Chen Tao¹,Dao Vanluu²

Affiliation:

1. Xi’an Jiaotong University, School of Electronics and Information Engineering, Key Laboratory for Physical Electronics and Devices of the Ministry of Education and Shaanxi Key Lab of Information Photonic Technique, No. 28, Xianning West Road, Xi’an 710049,

2. Le Quy Don Technical University, Lab of Advanced Technology, No. 100, Hoang Quoc Viet Street, Hanoi 7EN-248, Vietnam

Publisher

SPIE-Intl Soc Optical Eng

Subject

General Engineering,Atomic and Molecular Physics, and Optics

Reference20 articles.

1. Fabrication of complex nanostructures on ZnO crystals by the interference of three femtosecond laser beams

2. Ripple-patterned substrates for light enhancement applications

3. Enhancement of local electrical conductivities in SiC by femtosecond laser modification

4. Enhancement of optical absorption and photocurrent of 6H-SiC by laser surface nanostructuring

5. Silicon carbide MEMS for harsh environments

Cited by 5 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. New ablation evolution behaviors in micro-hole drilling of 2.5D Cf/SiC composites with millisecond laser;Ceramics International;2021-11

2. Study on damage characteristics and ablation mechanism in fiber laser trepan drilling of 2.5D Cf/SiC composites;The International Journal of Advanced Manufacturing Technology;2021-09-01

3. Feasibility of micro-hole machining in fiber laser trepan drilling of 2.5D Cf/SiC composite: Experimental investigation and optimization;Optik;2021-09

4. Evolution of micro/nano-structural arrays on crystalline silicon carbide by femtosecond laser ablation;Materials Science in Semiconductor Processing;2021-01

5. Effect of the surface microstructure ablated by femtosecond laser on the bonding strength of EBCs for SiC/SiC composites;Optics Communications;2018-10