Design method of off-axis extreme ultraviolet lithographic objective system with a direct tilt process-Reference-Cited by-同舟云学术

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Design method of off-axis extreme ultraviolet lithographic objective system with a direct tilt process

Published:2015-07-08 Issue:7 Volume:54 Page:075102
ISSN:0091-3286
Container-title:Optical Engineering
language:en
Short-container-title:Opt. Eng

Author:

Liu Yan,Li Yanqiu,Cao Zhen

Publisher

SPIE-Intl Soc Optical Eng

Subject

General Engineering,Atomic and Molecular Physics, and Optics

Cited by 19 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

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3. Automatic control method for freeform surface shapes;Optics Express;2023-08-15

4. Integrated Generation Method for the Initial System of Off-axis Reflective Optical Systems;2023 IEEE 13th International Conference on CYBER Technology in Automation, Control, and Intelligent Systems (CYBER);2023-07-11

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