Radial-quality uniformity investigations of large-area thick Al films-Reference-Cited by-同舟云学术

Radial-quality uniformity investigations of large-area thick Al films

Published:2015-04-28 Issue:4 Volume:54 Page:045106
ISSN:0091-3286
Container-title:Optical Engineering
language:en
Short-container-title:Opt. Eng

Author:

Yang Haigui¹,Li Zizheng²,Wang Xiaoyi¹,Shen Zhenfeng¹,Gao Jinsong²,Zhang Shanwen¹

Affiliation:

1. Chinese Academy of Sciences, Changchun Institute of Optics, Fine Mechanics and Physics, Key Laboratory of Optical System Advanced Manufacturing Technology, Dong Nanhu Road 3888, Changchun 130033, China

2. Chinese Academy of Sciences, Changchun Institute of Optics, Fine Mechanics and Physics, Key Laboratory of Optical System Advanced Manufacturing Technology, Dong Nanhu Road 3888, Changchun 130033, ChinabUniversity of Chinese Academy of Sciences, Daheng Aca

Publisher

SPIE-Intl Soc Optical Eng

Subject

General Engineering,Atomic and Molecular Physics, and Optics

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