1. Taiyuan University of Technology, MicroNano System Research Center, College of Information Engineering, Key Laboratory of Advanced Transducers and Intelligent Control System (Ministry of Education), No. 79, Yingze Road (West), Taiyuan 030024, Shanxi, Chin
2. North University of China, College of Instrument and Electronics, No. 3, Xueyuan Road, Taiyuan 030051, Shanxi, China