Measurement of aspheric surface combining point diffraction interferometry and annular subaperture stitching-Reference-Cited by-同舟云学术

Measurement of aspheric surface combining point diffraction interferometry and annular subaperture stitching

Published:2015-01-02 Issue:1 Volume:54 Page:014102
ISSN:0091-3286
Container-title:Optical Engineering
language:en
Short-container-title:Opt. Eng

Author:

Gao Fen¹,Jiang Zhuangde²,Zhao Zixin²,Li Bing²

Affiliation:

1. Xi’an Jiaotong University, State Key Laboratory for Manufacturing Systems Engineering, No. 28 Xianning West Road, Xi’an 710049, ChinabXi’an Technological University, School of Optoelectronic Engineering, No. 4 Jinhua North Road, Xi’an 710032, China

2. Xi’an Jiaotong University, State Key Laboratory for Manufacturing Systems Engineering, No. 28 Xianning West Road, Xi’an 710049, China

Publisher

SPIE-Intl Soc Optical Eng

Subject

General Engineering,Atomic and Molecular Physics, and Optics

Reference20 articles.

1. Theory and Application of Point-Diffraction Interferometers

2. Absolute measurement of a spherical surface using a point diffraction interferometer

3. Development of the point diffraction interferometer for extreme ultraviolet lithography: Design, fabrication, and evaluation

4. Polarization phase-shifting point-diffraction interferometer

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