Study on the roughness evolution of optical surfaces during ion beam sputtering-Reference-Cited by-同舟云学术

Study on the roughness evolution of optical surfaces during ion beam sputtering

Published:2015-10-12 Issue:10 Volume:54 Page:104105
ISSN:0091-3286
Container-title:Optical Engineering
language:en
Short-container-title:Opt. Eng

Author:

Liang Xiao¹,Wang Xiang¹,Gu Yong-Qiang²,Zheng Jin-Jin¹,Yang Huai-Jiang²,Sui Yong-Xin²

Affiliation:

1. University of Science and Technology of China, Department of Precision Machinery and Precision Instrumentation, 443 Huangshan Road, Hefei, Anhui 230026, China

2. Chinese Academy of Sciences, Changchun Institute of Optics, Fine Mechanics and Physics, 3888 Dongnanhu Road, Changchun, Jilin 130033, China

Publisher

SPIE-Intl Soc Optical Eng

Subject

General Engineering,Atomic and Molecular Physics, and Optics

Reference27 articles.

1. Extreme ultraviolet lithography: A review

2. EUV lithography with the Alpha Demo Tools: status and challenges

3. Ion beam and plasma jet etching for optical component fabrication

4. Corrective capability analysis and machining error control in ion beam figuring of high-precision optical mirrors

5. Ultra-precision surface finishing by ion beam and plasma jet techniques—status and outlook

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1. Influence mechanism of plasma cleaning and ion beam figuring on the intrinsic surface of fused silica;Second Symposium on Novel Technology of X-Ray Imaging;2019-05-10

2. Preferential sputtering on multicomponent optical surfaces;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;2017-11