1. International Technology Roadmap for Semiconductors < http://www.itrs2.net/ >.
2. Advanced inspection technique for deep-submicron and high-aspect-ratio contact holes;Matsui,2002
3. Novel SEM Based Imaging Using Secondary Electron Spectrometer for Enhanced Voltage Contrast and Bottom Layer Defect Review;Avinun-Kalish,2009
4. Secondary electron emission in the scanning electron microscope
5. Material contrast based in line metrology - process verification and control using Back Scattered Electron Imaging on CD-SEM;Hartig,2013