Shape measurement simulation of grazing incidence mirror based on fringe reflection method in polar coordinates-Reference-Cited by-同舟云学术

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Shape measurement simulation of grazing incidence mirror based on fringe reflection method in polar coordinates

Published:2022-02-15 Issue: Volume: Page:
ISSN:
Container-title:Seventh Asia Pacific Conference on Optics Manufacture and 2021 International Forum of Young Scientists on Advanced Optical Manufacturing (APCOM and YSAOM 2021)
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Author:

Zheng JunZhen,Ma Tao,Wang Fan

Publisher

SPIE

Reference10 articles.

1. Study on surface profile measurement and imaging performance test of Wolter type I mirror[D];Tian-gang,2011

2. The moire method - a new experimental method for the determination of moments in small slab models[C];Ligtenberg,1954

3. Reflection grating method for 3D measurement of reflecting surfaces

4. Software configurable optical test system: a computerized reverse Hartmann test

5. Instantaneous phase shifting deflectometry

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