Diffusion-induced structural changes in La/B-based multilayers for 6.7-nm radiation-Reference-Cited by-同舟云学术

Diffusion-induced structural changes in La/B-based multilayers for 6.7-nm radiation

Published:2014-03-17 Issue:1 Volume:13 Page:013014
ISSN:1932-5150
Container-title:Journal of Micro/Nanolithography, MEMS, and MOEMS
language:en
Short-container-title:J. Micro/Nanolith. MEMS MOEMS

Author:

Nyabero Steven L.¹,van de Kruijs Robbert W. E.¹,Yakshin Andrey E.¹,Makhotkin Igor A.¹,Bosgra Jeroen¹,Bijkerk Fred²

Affiliation:

1. FOM Dutch Institute for Fundamental Energy Research, P.O. Box 1207, 3430 BE Nieuwegein, The Netherlands

2. FOM Dutch Institute for Fundamental Energy Research, P.O. Box 1207, 3430 BE Nieuwegein, The NetherlandsbUniversity of Twente, MESA+ Institute for Nanotechnology, P.O. Box 217, 7500 AE Enschede, The Netherlands

Publisher

SPIE-Intl Soc Optical Eng

Subject

Electrical and Electronic Engineering,Mechanical Engineering,Condensed Matter Physics,Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials

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