Simulations and experiments on excimer laser micromachining of metal and polymer-Reference-Cited by-同舟云学术

Simulations and experiments on excimer laser micromachining of metal and polymer

Published:2014-02-14 Issue:1 Volume:13 Page:013008
ISSN:1932-5150
Container-title:Journal of Micro/Nanolithography, MEMS, and MOEMS
language:en
Short-container-title:J. Micro/Nanolith. MEMS MOEMS

Author:

Akhtar Syed Nadeem¹,Choudhary Hirendra²,Anantha Ramakrishna S.³,Ramkumar Janakarajan¹

Affiliation:

1. Indian Institute of Technology Kanpur, Department of Mechanical Engineering, Kanpur—208016, India

2. Schlumberger, Mumbai, India

3. Indian Institute of Technology Kanpur, Department of Physics, Kanpur—208016, India

Publisher

SPIE-Intl Soc Optical Eng

Subject

Electrical and Electronic Engineering,Mechanical Engineering,Condensed Matter Physics,Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials

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