Reconstruction of the in-depth profile of line gratings with critical dimension grazing incidence small angle x-ray scattering on a laboratory equipment-Reference-Cited by-同舟云学术

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Reconstruction of the in-depth profile of line gratings with critical dimension grazing incidence small angle x-ray scattering on a laboratory equipment

Published:2023-04-27 Issue: Volume: Page:
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Container-title:Metrology, Inspection, and Process Control XXXVII
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Author:

Freychet Guillaume,Rademaker Guido J.,Blancquaert Yoann,Gergaud Patrice

Publisher

SPIE

Cited by 3 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Small angle x-ray scattering overlay metrology for advanced nodes;Metrology, Inspection, and Process Control XXXVIII;2024-04-10

2. Cross-evaluation of critical dimension measurement techniques;Journal of Micro/Nanopatterning, Materials, and Metrology;2024-03-08

3. 二维正交光栅结构的掠入射小角X射线散射测量;Acta Optica Sinica;2024

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