Estimation of effects of thermal fluctuations in graphoepitaxy DSA of cylinder-forming block copolymers-Reference-Cited by-同舟云学术

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Estimation of effects of thermal fluctuations in graphoepitaxy DSA of cylinder-forming block copolymers

Published:2017-03-27 Issue: Volume: Page:
ISSN:0277-786X
Container-title:SPIE Proceedings
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Author:

Bowen Alec¹,Latypov Azat¹,Bailey Todd¹

Affiliation:

1. GLOBALFOUNDRIES Inc. (United States)

Publisher

SPIE

Reference7 articles.

1. Fundamental study of placement errors in directed self-assembly;Wuister,2014

2. Effects of thermal fluctuations on directed self-assembly in cylindrical confinement;Laachi,2015

3. Effects of thermal fluctuations and block copolymers compositions on defects in directed self-assembly hole shrink process;Fukawatase,2015

4. Fredrickson, G. H., [The Equilibrium Theory of Inhomogeneous Polymers], Oxford University Press (2006).

5. Exploration of the directed self-assembly based nano-fabrication design space using computational simulations;Latypov,2013

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