Polarizer-Surface-Analyzer (PSA) Ellipsometry Of Conical Elements
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Published:1982-12-01
Issue:6
Volume:21
Page:
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ISSN:0091-3286
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Container-title:Optical Engineering
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language:en
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Short-container-title:Opt. Eng
Author:
German J. D.,Ferguson T. R.,Latham, Jr. W. P.
Publisher
SPIE-Intl Soc Optical Eng
Subject
General Engineering,Atomic and Molecular Physics, and Optics