Low-cost single-mode waveguide fabrication allowing passive fiber coupling using LIGA and UV flood exposure-Reference-Cited by-同舟云学术

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Low-cost single-mode waveguide fabrication allowing passive fiber coupling using LIGA and UV flood exposure

Published:2004-09-08 Issue: Volume: Page:
ISSN:0277-786X
Container-title:SPIE Proceedings
language:
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Author:

Henzi Patric,Rabus Dominik G.,Bade K.,Wallrabe Ulrike,Mohr Juergen

Publisher

SPIE

Cited by 17 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Dry-film polymer waveguide for silicon photonics chip packaging;Optics Express;2014-09-17

2. Development of reel-to-reel process system for roller-imprint on plastic fibers;Microelectronic Engineering;2011-08

3. Fabrication and optical characterization of sub-micronic waveguide structures on UV210 polymer;Journal of Optics;2010-05-01

4. Lipid multilayer gratings;Nature Nanotechnology;2010-02-28

5. Effects of UV-irradiation on the thermo-mechanical properties of optical grade poly(methyl methacrylate);Applied Surface Science;2010-02

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