1. Consideration of correlativity between Litho and Etching shape;Matsuoka,2012
2. Automated SEM Recipe Generation for OPC Applications;Berthiaume,2012
3. SEM image prediction based on modeling of electron-solid interaction;Kameda,2017
4. SegNet: A Deep Convolutional Encoder-Decoder Architecture for Robust Semantic Pixel-Wise Labelling;Badrinarayanan,2014