1. Creating value for all stakeholders;Wennink,2014
2. ITRS, International Technology Roadmap for Semiconductors, http://www.itrs.net.
3. Immersion Scanners Enabling 10 nm half pitch Production and Beyond;Egashira,2014
4. Improvements in bandwidth and wavelength control for XLR 660ix systems;Conley,2014
5. Active spectral control of DUV light sources for OPE minimization