1. Scattering effects from residual optical fabrication errors;Harvey,1995
2. Zernike coefficients: are they really enough?;Progler,2000
3. Use of power spectral density (PSD) functions in specifying optics for the National Ignition Facility;Aikens,1995
4. Advanced Metrology Tools Applied for Lithography Optics Fabrication and Testing
5. Fabrication and metrology of 10X Schwarschild optics for EUV imaging;Marchetti,2004