Combined processing of optical parts through surface polishing with a beam of fast argon atoms and deposition of nanostructured protective films by magnetron target sputtering
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Published:2021-08-01
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Container-title:Nanoengineering: Fabrication, Properties, Optics, Thin Films, and Devices XVIII
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Author:
Grigoriev Sergey N.,Metel Alexander,Melnik Yury,Mustafaev Enver,Volosova Marina A.