Dose-focus monitor technique using a critical-dimension scanning electron microscope and its application to local variation analysis
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Published:2012-12-11
Issue:4
Volume:11
Page:043011
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ISSN:1932-5150
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Container-title:Journal of Micro/Nanolithography, MEMS, and MOEMS
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language:en
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Short-container-title:J. Micro/Nanolith. MEMS MOEMS
Author:
Hotta Shoji,Brunner Timothy,Halle Scott,Hitomi Keiichiro,Kato Takeshi,Yamaguchi Atsuko
Publisher
SPIE-Intl Soc Optical Eng
Subject
Electrical and Electronic Engineering,Mechanical Engineering,Condensed Matter Physics,Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials