Estimation of thermo-elastic damping of vibrations in micro-electro-mechanical systems resonators: finite element modeling-Reference-Cited by-同舟云学术

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Estimation of thermo-elastic damping of vibrations in micro-electro-mechanical systems resonators: finite element modeling

Published:2012-07-13 Issue:3 Volume:11 Page:033005
ISSN:1932-5150
Container-title:Journal of Micro/Nanolithography, MEMS, and MOEMS
language:en
Short-container-title:J. Micro/Nanolith. MEMS MOEMS

Author:

Kausinis Saulius

Publisher

SPIE-Intl Soc Optical Eng

Subject

Electrical and Electronic Engineering,Mechanical Engineering,Condensed Matter Physics,Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials

Reference23 articles.

1. C. T. Leondes , Ed.,MEMS/NEMS Handbook: Techniques and Applications, Vol. 1–5, Springer Science+Business Media, New York, NY (2006).

2. http://www.darpa.mil/mto/programs/ngimg/index.html.

3. Wise, K. D. , The Engineering Research Center for Wireless Integrated MicroSystems (WIMS), Annual report 2009, http://www.wimserc.org.

4. NavChip, InterSense website http://www.intersense.com/pages/16/16.

5. “Micromachined disc resonator gyroscope,” Jet Propulsion Laboratory: MDL, Vol. 07, Annual report, pp. 40–43, http://microdevices.jpl.nasa.gov/about-mdl/annual-reports/MDL_AR07.pdf (2007).

Cited by 2 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Study of Intrinsic Dissipation Due to Thermoelastic Coupling in Gyroscope Resonators;Sensors;2016-09-07

2. Thermoelastic coupling effect analysis for gyroscope resonator from longitudinal and flexural vibrations;Microsystem Technologies;2015-03-03

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